Role of interfacial nitrogen in improving thin silicon oxides grown in N2O

Applied Physics Letters

Volumn 63, Issue 1, 1993, Pages 54-56

  Carr, E C ^a   Buhrman, R A ^a  

^a Department of Obstetrics Gynecology   (United States)

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EID: 36449005359     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.109749     Document Type: Article

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