Controlled nitrogen incorporation at the gate oxide surface

Applied Physics Letters

Volumn 66, Issue , 1995, Pages 3489-

  Hattangady, S V ^a   Niimi, H ^a   Lucovsky, G ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449005178     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.113775     Document Type: Article

References (10)