The mechanism of iron gettering in boron-doped silicon

Applied Physics Letters

Volumn , Issue , 1995, Pages 51-

  Stolk, P A ^a   Benton, J L ^a   Eaglesham, D J ^a   Jacobson, D C ^a   Cheng, J Y ^a   Poate, J M ^a   Myers, S M ^b   Haynes, T E ^c  

^a LUCENT TECHNOLOGIES   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

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EID: 36449005039     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116754     Document Type: Article

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