Preparation of (100)‐oriented metallic LaNiO3 thin films on Si substrates by radio frequency magnetron sputtering for the growth of textured Pb(Zr0.53Ti0.47)O3

Applied Physics Letters

Volumn 66, Issue 20, 1995, Pages 2643-2645

  Yang, Ching‐chyuan ^a   Chen, Ming‐sen ^a   Hong, Tian‐jue ^a   Chiiaming C ^a   Jennaming J ^a   Taiabor T ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

CAPACITORS; DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRODES; FILM GROWTH; LANTHANUM COMPOUNDS; MAGNETRONS; MULTILAYERS; NIOBATES; PZT; SPUTTERING

Indexed keywords

EID: 36449004207     PISSN: 00036951     EISSN: 10773118     Source Type: Journal    
DOI: 10.1063/1.113111     Document Type: Article

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