Comparison of Si surface roughness measured by atomic force microscopy and ellipsometry

Applied Physics Letters

Volumn , Issue , 1995, Pages 2837-

  Fang, S J ^a   Chen, W ^a   Yamanaka, T ^a   Helms, C R ^a  

^a STANFORD UNIVERSITY   (United States)

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EID: 36449003913     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116341     Document Type: Article

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