Characteristics of carbon nitride films synthesized by single-source ion beam enhanced deposition system

Applied Physics Letters

Volumn , Issue , 1995, Pages 1291-

  Wu, Zhaocu ^a   Yu, Yuehui ^a   Liu, Xianghuai ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

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EID: 36449003842     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115956     Document Type: Article

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