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Journal of Applied Physics

Volumn 76, Issue 12, 1994, Pages 8186-8188

Electron-spin-resonance evidence for an impurity-related E'-like hole trapping defect in thermally grown SiO2 on Si

(5) Conley Jr , John F a Lenahan, P M a Evans, H L b Lowry, R K b Morthorst, T J b

a PENNSYLVANIA STATE UNIVERSITY (United States)

b INTERSIL CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449003367 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.357871 Document Type: Article

Times cited : (9)

References (35)

1
- 0003495751
- edited by (Wiley-Interscience, New York) Chap3
- (1989) Ionizing Radiation Effects in MOS Devices and Circuits
- McLean, F.B.¹ Boesch, H.E.² Oldham, T.R.³ Ma, T.P.⁴ Dressendorfer, P.V.⁵

2
- 84951360354
- (1979) IEEE Trans. Electron Devices , vol.ED-36 , pp. 246
- Ning, T.H.¹ Cook, P.W.² Dennard, R.H.³ Osburn, C.M.⁴ Schuster, S.E.⁵ Yu, H.N.⁶

3
- 0003495751
- edited by (Wiley-Interscience, New York) Chap6
- (1989) Ionizing Radiation Effects in MOS Devices and Circuits
- Dressendorfer, P.V.¹ Ma, T.P.² Dressendorfer, P.V.³

4
- 0016619857
- (1975) Solid State Commun , vol.17 , pp. 1397
- Soloman, P.¹ Klein, N.²

5
- 0020253294
- (1982) IEEE Trans. Nucl. Sci , vol.NS-29 , pp. 1459
- Lenahan, P.M.¹ Dressendorfer, P.V.²

6
- 0020910298
- (1983) IEEE Trans. Nucl. Sci , vol.NS-30 , pp. 4602
- Lenahan, P.M.¹ Dressendorfer, P.V.²

7
- 0021427238
- (1984) J. Appl. Phys , vol.55 , pp. 3495
- Lenahan, P.M.¹ Dressendorfer, P.V.²

8
- 0000206815
- edited by (Academic, New York)
- (1990) Glass Science and Technology , vol.4B , pp. 151
- Griscom, D.L.¹ Uhlman, D.R.² Kreidl, N.J.³

9
- 51149208555
- (1987) Appl. Phys. Lett , vol.51 , pp. 1334
- Takahashi, T.¹ Triplett, B.B.² Yokogawa, K.³ Sugano, T.⁴

10
- 84921252627
- (1987) Z. Phys. Chem. N. F , vol.151 , pp. 227
- Carlos, W.E.¹

11
- 0024123631
- (1988) IEEE Trans. Electron Devices , vol.ED-35 , pp. 2245
- Miki, H.¹ Noguchi, M.² Yokogawa, K.³ Kim, B.⁴ Asada, K.⁵ Sugano, T.⁶

12
- 0026377190
- (1991) J. Non-Cryst. Solids , vol.136 , pp. 151
- Warren, W.L.¹ Lenahan, P.M.² Brinker, C.J.³

13
- 0026185990
- (1991) J. Electrochem. Soc , vol.138 , pp. 2050
- Lipkin, L.¹ Rowan, L.² Reisman, A.³ Williams, C.K.⁴

14
- 0001257610
- (1992) Appl. Phys. Lett , vol.60 , pp. 2889
- Conley, J.F.¹ Lenahan, P.M.² Roitman, P.³

15
- 0000548287
- (1992) IEEE Trans. Nucl Sci , vol.NS-39 , pp. 2114
- Conley, J.F.¹ Lenahan, P.M.² Roitman, P.³

16
- 0001310775
- (1992) IEEE Trans. Nucl. Sci , vol.NS-39 , pp. 2186
- Conley, J.F.¹ Lenahan, P.M.²

17
- 0001038451
- (1987) Appl. Phys. Lett , vol.50 , pp. 1663
- Triplett, B.B.¹ Takahashi, T.² Sugano, T.³

18
- 0027853278
- (1993) IEEE Trans. Nucl. Sci , vol.NS-40 , pp. 1335
- Conley, J.F.¹ Lenahan, P.M.²

19
- 0027641182
- (1993) Microelectron. Eng , vol.22 , pp. 215
- Conley, J.F.¹ Lenahan, P.M.²

20
- 0001191838
- (1992) Phys. Rev. B , vol.45 , pp. 9501
- Stesmans, A.¹

21
- 0012561304
- (1993) Appl. Phys. Lett , vol.62 , pp. 1661
- Warren, W.L.¹ Schwank, J.R.² Shaneyfelt, M.R.³ Fleetwood, D.M.⁴ Winokur, P.S.⁵

22
- 21544457445
- (1993) J. Appl. Phys , vol.74 , pp. 275
- Vanheusden, K.¹ Stesmans, A.²

23
- 36449003994
- (1993) Appl. Phys. Lett , vol.62 , pp. 2405
- Vanheusden, K.¹ Stesmans, A.²

24
- 21544478697
- (1993) Appl. Phys. Lett , vol.63 , pp. 2926
- Devine, R.A.B.¹ Mathiot, D.² Warren, W.L.³ Fleetwood, D.M.⁴ Aspar, B.⁵

25
- 0027851925
- (1993) IEEE Trans. Nucl. Sci , vol.NS-40 , pp. 1755
- Warren, W.L.¹ Shaneyfelt, M.R.² Schwank, J.R.³ Fleetwood, D.M.⁴ Winokur, P.S.⁵ Devine, R.A.B.⁶ Maszara, W.P.⁷ McKitterick, J.B.⁸

26
- 36449001399
- (1994) J. Appl. Phys , vol.76 , pp. 2872
- Conley, J.F.¹ Lenahan, P.M.² Evans, H.L.³ Lowry, R.K.⁴ Morthorst, T.J.⁵

27
- 4243434794
- (1986) Phys. Rev. B , vol.34 , pp. 7524
- Griscom, D.L.¹ Friebele, E.J.²

28
- 0016883932
- (1976) J. Appl. Phys , vol.47 , pp. 248
- Weinberg, Z.E.¹ Johnson, W.C.² Lambert, M.A.³

29
- 84951344683
- The ions have essentially thermal kinetic energy and thus do not damage the oxides

30
- 0008987187
- (1976) Appl. Phys. Lett , vol.28 , pp. 627
- Winokur, P.S.¹ Sokoloski, M.M.²

31
- 0004179163
- Chap13 (Saunders College Publishing, Philadelphia)
- (1977) Physical Methods in Chemistry
- Drago, R.S.¹

32
- 36849100202
- (1967) J. Chem. Phys , vol.47 , pp. 818
- Schreurs, J.W.H.¹

33
- 36149026488
- (1963) Phys. Rev , vol.130 , pp. 570
- Weeks, R.A.¹

34
- 0038822337
- (1984) Nucl. Instrum. Methods Phys. Res. B , vol.1 , pp. 503
- Cases, R.¹ Griscom, D.L.²

35
- 0003699181
- (Lattice, Sunset Beach, CA)
- (1986) Silicon Processing for the VLSI Era: —Processing Technology , pp. 61-70
- Wolf, S.¹ Tauber, R.N.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.