Chemical vapor deposition of copper with a new metalorganic source

Applied Physics Letters

Volumn , Issue , 1995, Pages 1017-

  Choi, E S ^a   Park, S K ^a   Shin, H K ^a,b   Lee, Hong H ^a  

^a Seoul National University   (South Korea)

^b UP Chemicals ^*

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EID: 36449003110     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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