Deposition of amorphous fluoropolymer thin films by thermolysis of Teflon amorphous fluoropolymer

Applied Physics Letters

Volumn 60, Issue 15, 1992, Pages 1866-1868

  Nason, T C ^a   Moore, J A ^a   Lu, T M ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

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EID: 36449002463     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.107163     Document Type: Article

References (14)