Reduction of unintentional aluminum spikes at SiC vapor phase epitaxial layer/substrate interfaces

Applied Physics Letters

Volumn , Issue , 1995, Pages 382-

  Burk Jr , A A ^a   Rowland, L B ^a  

^a WESTINGHOUSE ELECTRIC COMPANY   (United States)

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EID: 36449002320     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116692     Document Type: Article

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