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Journal of Applied Physics

Volumn 77, Issue 3, 1995, Pages 1263-1274

Chemical and physical sputtering of fluorinated silicon

(2) Barone, M E a Graves, D B a

a University of California (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449002256 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.358928 Document Type: Article

Times cited : (94)

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