Feedback positioning cantilever using lead zirconate titanate thin film for force microscopy observation of micropattern

Applied Physics Letters

Volumn , Issue , 1995, Pages 467-

  Fujii, Toru ^a   Watanabe, Shunji ^a  

^a NIKON CORPORATION   (Japan)

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EID: 36449001639     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116415     Document Type: Article

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