Real-time assessment of overlayer removal on GaN, AlN, and AlGaN surfaces using spectroscopic ellipsometry

Applied Physics Letters

Volumn , Issue , 1995, Pages 2065-

  Edwards, N V ^a   Bremser, M D ^a   Weeks Jr , T W ^a   Kern, R S ^a   Davis, R F ^a   Aspnes, D E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449001489     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)