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Volumn 59, Issue 25, 1991, Pages 3241-3243
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Correlation of texture with electromigration behavior in Al metallization
a a b |
Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 36449001407
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.105745 Document Type: Article |
Times cited : (116)
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References (19)
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