메뉴 건너뛰기




Volumn 59, Issue 25, 1991, Pages 3241-3243

Correlation of texture with electromigration behavior in Al metallization

Author keywords

[No Author keywords available]

Indexed keywords


EID: 36449001407     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.105745     Document Type: Article
Times cited : (116)

References (19)
  • 17
    • 3643062740 scopus 로고
    • presented at MRS Fall Meeting, November 1990, Boston, MA; Evolution of Thin Film and Surface Microstructures (MRS, Pittsburgh, PA)
    • (1991) , pp. 199
    • Knorr, D.B.1    Tracy, D.P.2    Lu, T.-M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.