Compositional mapping of semiconductor structures by friction force microscopy

Applied Physics Letters

Volumn , Issue , 1995, Pages 2297-

  Tamayo, J ^a   Gonzalez L ^a   Gonzalez Y ^a   Garcia R ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

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Indexed keywords

EID: 36449000453     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116169     Document Type: Article

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