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Applied Physics Letters

Volumn 65, Issue 14, 1994, Pages 1775-1777

Nanolithography with an atomic force microscope for integrated fabrication of quantum electronic devices

(5) Wendel, M a Kuhn S a Lorenz, H a Kotthaus, J P a Holland, M b

a UNIVERSITY OF MUNICH (Germany)

b UNIVERSITY OF GLASGOW (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36448999924 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.112914 Document Type: Article

Times cited : (108)

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