Fabrication of high aspect ratio silicon pillars of <10 nm diameter

Applied Physics Letters

Volumn 63, Issue 8, 1993, Pages 1116-1118

  Chen, Wei ^a   Ahmed, Haroon ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36448998702     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.109798     Document Type: Article

References (9)