Multiaxis maglev positioner with nanometer resolution over extended travel range

Journal of Dynamic Systems, Measurement and Control, Transactions of the ASME

Volumn 129, Issue 6, 2007, Pages 777-785

  Kim, Won Jong ^a,b   Verma, Shobhit ^a  

^a ASME   (United States)

^b Department of Electrical and Computer Engineering   (United States)

Author keywords

Magnetic levitation; Multi axis motion control; Nanomanipulation; Precision positioning; Real time digital control

Indexed keywords

MULTI AXIS MOTION CONTROLS; NANOMANIPULATIONS; PRECISION POSITIONING; REAL TIME DIGITAL CONTROLS;

LASER INTERFEROMETRY; MAGNETIC LEVITATION; MAGNETS; MOTION CONTROL; OPTICAL RESOLVING POWER; POSITION CONTROL; SENSORS;

TRACKING (POSITION);

EID: 36448932421     PISSN: 00220434     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.2789468     Document Type: Article

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