Mass density and hydrogen content of diamondlike carbon as related to the preparation by plasma-enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 79, Issue 8, 1996, Pages 4050-4056

  Vigild, M E ^a   Findeisen, E ^a   Feidenhans'l, R ^a   Barholm Hansen, C ^b   Bentzon, M D ^b   Bindslev Hansen, J ^b  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b NKT Research & Innovation AS   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3643132790     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361833     Document Type: Article

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