Novel reflected light confocal profilometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2984, Issue , 1997, Pages 101-112

  Conchello, José Angel ^a   Heym, Jason P ^a   Wei, Jesse L ^a   Lichtman, Jeff W ^a  

^a WASHINGTON UNIVERSITY   (United States)

Author keywords

Confocal; Optical section; Profilometry; Reflected light

Indexed keywords

IMAGE ACQUISITION; LAWS AND LEGISLATION; LIGHT MEASUREMENT; MERGERS AND ACQUISITIONS; MICROSCOPES; OPTICAL MICROSCOPY; PROFILOMETRY; SPECTROSCOPIC ANALYSIS; THREE DIMENSIONAL;

APERTURE STOPS; BACK FOCAL PLANES; CONFOCAL; CONFOCAL MICROSCOPES; CONFOCAL SCANNING; DEPTH RESOLUTIONS; ILLUMINATION LIGHTS; LATERAL RESOLUTIONS; LIGHT MICROSCOPES; NOVEL TECHNIQUES; OPTICAL SECTION; OPTICAL-; ORIENTATION ANGLES; REFLECTED LIGHT; REFLECTING SURFACES; TILT ANGLES; TOPOGRAPHICAL MAPS;

LIGHT;

EID: 3643104338     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271256     Document Type: Conference Paper

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