Surface profile determination by additive-subtractive phase modulated ESPI with fourier analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2860, Issue , 1996, Pages 162-174

  Wang, Liu Sheng ^a   Krishnaswamy, Sridhar ^a  

^a Northwestern University   (United States)

Author keywords

Additive subtractive phase modulated ESPI; Fourier transform; Shape measurement

Indexed keywords

FOURIER ANALYSIS; FOURIER TRANSFORMS; LASER INTERFEROMETRY; PHASE MODULATION; SPECKLE;

AUTOMATICALLY GENERATED; ELECTRONIC SPECKLE PATTERN INTERFEROMETRY; ENGINEERING COMPONENTS; ENVIRONMENTAL CONDITIONS; OPTICAL PATHLENGTH DIFFERENCES; PHASE MODULATED; QUANTITATIVE MEASUREMENT; SHAPE MEASUREMENTS;

ADDITIVES;

EID: 3643060844     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276302     Document Type: Conference Paper

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