Fabrication of ZnO nanorod-based hydrogen gas nanosensor

Microelectronics Journal

Volumn 38, Issue 12, 2007, Pages 1211-1216

  Lupan, Oleg ^a,b   Chai, Guangyu ^c   Chow, Lee ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

^b TECHNICAL UNIVERSITY OF MOLDOVA   (Moldova)

^c Apollo Technologies Inc   (United States)

Author keywords

Gas sensor; Hydrogen; Nanofabrication; Nanoscale materials and structures; ZnO branched nanorod

Indexed keywords

FOCUSED ION BEAMS; HYDROGEN; NANOSTRUCTURED MATERIALS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

NANOSCALE MATERIALS; ZNO BRANCHED NANORODS;

CHEMICAL SENSORS;

EID: 36349020297     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2007.09.004     Document Type: Article

References (32)

1. Basic research needs to assure a secure energy future, A Report from the Basic Energy Sciences Advisory Committee, February 2003. Available from 〈http://www.sc.doe.gov/bes/besac/Basic_Research_Needs_To_Assure_A_Secure_Energy_Future_FEB2003.pdf〉.
2. 〈http://www.sc.doe.gov/bes/hydrogen.pdf〉.
3. Wang H.T., Kang B.S., Ren F., Tien L.C., Sadik P.W., Norton D.P., Pearton S.J., and Lin J. Hydrogen-selective sensing at room temperature with ZnO nanorods. Appl. Phys. Lett. 86 (2005) 243503-243505
4. Tien L.C., Sadik P.W., Norton D.P., Voss L.F., Pearton S.J., Wang H.T., Kang B.S., Ren F., Jun J., and Lin J. Hydrogen sensing at room temperature with Pt-coated ZnO thin films and nanorods. Appl. Phys. Lett. 87 (2005) 222106-222108
5. Kang B.S., Heo Y.W., Tien L.C., Norton D.P., Ren F., Gila B.P., and Pearton S.J. Hydrogen and ozone gas sensing using multiple ZnO nanorods. Appl. Phys. A 80 (2005) 1029-1032
6. Wang J.X., Sun X.W., Yang Y., Huang H., Lee Y.C., Tan O.K., and Vayssieres L. Hydrothermally grown oriented ZnO nanorod arrays for gas sensing applications. Nanotechnology 17 19 (2006) 4995-4998
7. Favier F., Walter E.C., Zach M.P., Benter T., and Penner R.M. Hydrogen sensors and electrodeposited palladium mesowire arrays. Science 293 (2001) 2227-2231
8. Yi G.C., Wang C., and Park W. ZnO nanorods: synthesis, characterization and applications. Semicond. Sci. Technol. 20 (2005) S22-S34
9. Liao L., Lu H.B., Li J.C., He H., Wang D.F., Fu D.J., Liu C., and Zhang W.F. Size dependence of gas sensitivity of ZnO nanorods. J. Phys. Chem. C 111 5 (2007) 1900-1903
10. Look D.C. Recent advances in ZnO materials and devices. Mater. Sci. Eng. B 80 (2001) 383-387
11. Özgür U., Alivov Ya.I., Liu C., Teke A., Reshchikov M.A., Dogan S., Avrutin V., Cho S.J., and Morkoç H.A. Comprehensive review of ZnO materials and devices. J. Appl. Phys. 98 (2005) 041301
12. Tian Z.R., Voigt J.A., Liu J., Mckenzie B., Mcdermott M.J., Rodriguez M.A., Konishi H., and Xu H. Complex and oriented ZnO nanostructure. Nat. Mater. 2 12 (2003) 821-826
13. Chen J.Y., Herricks T., and Xia Y.N. Angew. Chem. Int. Ed. 44 (2005) 2589
14. O. Lupan, L. Chow, Synthesis and characterizations of ZnO nanorods arrays and mesoporous films for device applications, in: Proceedings of NSTI Nanotechnology Conference and Trade Show, Santa Clara, CA, USA, 20-24 May 2007, v. 4, 457-460
15. O. Lupan, G. Chai, L. Chow, In-situ lift-out fabrication and characterizations of ZnO branched nanorods-based sensors, in: Proceedings of NSTI Nanotechnology Conference and Trade Show, Santa Clara, CA, USA, 20-24 May 2007.
16. Sun Z.-P., Liu L., Zhang L., and Jia D.-Z. Rapid synthesis of ZnO nano-rods by one-step, room-temperature, solid-state reaction and their gas-sensing properties. Nanotechnology 17 (2006) 2266-2270
17. Tien L.C., Wang H.T., Kang B.S., Ren F., Sadik P.W., Norton D.P., Pearton S.J., and Lin J. Room-temperature hydrogen-selective sensing using single Pt-coated ZnO nanowires at microwatt power levels. Electrochem. Solid-State Lett. 8 9 (2005) G230-G232
18. Min Y., Tuller H.L., Palzer S., Wöllenstein J., and Böttner H. Gas response of reactively sputtered ZnO films on Si-based micro-array. Sens. Actuators B: Chem. 93 1-3 (2003) 435-441
19. Rout C.S., Kulkarni G.U., and Rao C.N.R. Room temperature hydrogen and hydrocarbon sensors based on single nanowires of metal oxides. J. Phys. D: Appl. Phys. 40 (2007) 2777-2782
20. Wang H.T., Kang B.S., Ren F., Tien L.C., Sadik P.W., Norton D.P., Pearton S.J., and Lin J. Detection of hydrogen at room temperature with catalyst-coated multiple ZnO nanorods. Appl. Phys. A: Mater. Sci. Process. 81 6 (2005) 1117-1119
21. 2S down to ppb levels at room temperature using sensors based on ZnO nanorods. Sens. Actuators B 113 1 (2006) 320-323
22. Galoppini E., Rochford J., Chen H., Saraf G., Lu Y., Hagfeldt A., and Boschloo G. Fast electron transport in metal organic vapor deposition grown dye-sensitized ZnO nanorod solar cells. J. Phys. Chem. B 110 (2006) 16159-16161
23. Du Pasquier A., Chen H., and Lu Y. Dye sensitized solar cells using well-aligned zinc oxide nanotip arrays. Appl. Phys. Lett. 89 (2006) 253513
24. O. Lupan, L. Chow, G. Chai, B. Roldan, A. Naitabdi, A. Schulte, H. Heinrich, Nanofabrication and characterization of ZnO nanorod arrays and branched microrods by aqueous solution route and rapid thermal processing, Mater. Sci. Eng. B., MSB-D-07-00715R1, in review.
25. Joint Committee on Powder Diffraction Standards, Powder Diffraction File No. 36-1451.
26. Chai G., Chow L., Zhou D., and Byahut S.R. Focused-ion-beam assisted fabrication of individual multiwall carbon nanotube field emitter. Carbon 43 (2005) 2083-2087
27. Hartnagel H.L., Dawar A.L., Jain A.K., and Jagadish C. Semiconducting Transparent Thin Films (1995), IOP, Bristol
28. Riu J., Maroto A., and Rius F.X. Nanosensors in environmental analysis. Talanta 69 2 (2006) 288-301
29. Raju A.R., and Rao C.N.R. Gas-sensing characteristics of ZnO and copper-impregnated ZnO. Sens. Actuators B 3 4 (1991) 305-310
30. Saito S., Miyayama M., Kuomoto K., and Yanagida H. Gas sensing characteristics of porous ZnO and Pt/ZnO ceramics. J. Am. Ceram. Soc. 68 (1985) 40-43
31. Basu S., and Dutta A. Room-temperature hydrogen sensors based on ZnO. Mater. Chem. Phys. 47 (1997) 93-96
32. Huang X.-J., and Choi Y.-K. Chemical sensors based on nanostructured materials. Sens. Actuators B: Chem. 122 2 (2007) 659-671