Optimizing the dynamic response of RF MEMS switches using tailored voltage pulses

EuroSime 2007: International Conference on Thermal, Mechanical and Multi-Physics Simulation Experiments in Microelectronics and Micro-Systems, 2007

Volumn , Issue , 2007, Pages

  Leus, Vitaly ^a   Hirshberg, Arnon ^a   Elata, David ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ANALYSIS; COMPUTER SIMULATION; DYNAMIC RESPONSE; HARMONIC ANALYSIS; MATHEMATICAL MODELS; SWITCHES; VOLTAGE MEASUREMENT; WAVEFORM ANALYSIS;

SWITCH ACTUATION; VOLTAGE PULSES; VOLTAGE WAVEFORMS;

MEMS;

EID: 36349010237     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESIME.2007.359967     Document Type: Conference Paper

References (5)

1. Rebeiz, G. M., RF MEMS: theory, design, and technology. (Hoboken, N.J., 2003).
2. J. J. Yao, "RF MEMS from a device perspective," JMM, Vol. 10 (2000), pp. R9-R38.
3. Steeneken, P. G., et al, "Dynamics and squeeze film gas damping of a capacitive RF MEMS switch," JMM, Vol. 15 (2005), pp. 176-184.
4. Elata, D., et al, "On the dynamic pull-in of electrostatic actuators with multiple degrees of freedom and multiple voltage sources," JMEMS, Vol. 15 (2006), pp.131-140.
5. Czaplewski, D. A., et al, "A soft-landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch," JMEMS, Vol. 15 (2006). pp. 1586-1594.