Effect of broadband illumination on reconstruction error of phase retrieval in optical metrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6617, Issue , 2007, Pages

  Brady, Gregory R ^a   Fienup, James R ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Broadband phase retrieval; Fourier optics; Optical metrology; Phase measurement; Phase retrieval; Surface measurement; Wavefront measurement

Indexed keywords

FOURIER OPTICS; ITERATIVE METHODS; MEAN SQUARE ERROR; OPTICAL VARIABLES MEASUREMENT; PHASE MEASUREMENT; WAVEFRONTS;

BROADBAND PHASE RETRIEVAL; OPTICAL METROLOGY; PHASE RETRIEVAL; WAVEFRONT MEASUREMENT;

SURFACE MEASUREMENT;

EID: 36249006588     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726184     Document Type: Conference Paper

References (9)

1. J.R. Fienup, "Phase Retrieval Algorithms: A Comparison," Appl. Opt. 21, 2758-2769 (1982).
2. D. Malacara, Optical Shop Testing, Wiley, New York, 1992.
3. J.R. Fienup, "Reconstruction of an Object from the Modulus of Its Fourier Transform," Opt. Lett. 3, 27-29 (1978).
4. G.R. Brady and J.R. Fienup, "Nonlinear optimization algorithm for retrieving the full complex pupil function," Opt. Express 14, 474-486 (2006).
5. J.R. Fienup, J.C. Marron, T.J. Schulz and J.H. Seldin, "Hubble Space Telescope Characterized by Using Phase Retrieval Algorithms," Appl. Opt. 32, 1747-1768 (1993).
6. Joseph W. Goodman, Introduction to Fourier Optics 3rd Ed., Roberts & Co., Greenwood Village, CO (2004).
7. J.R. Fienup, "Phase Retrieval for Undersampled Broadband Images," J. Opt. Soc. Am. A 16, 1831-1839 (1999).
8. W. H. Press, B. P. Flannery, S. A. Teukolsky, and W. T. Vetterling, Numerical Recipes: The Art of Scientific Computing, Cambridge University Press, Cambridge (1986), Chap. 10.
9. J. R. Fienup, "Phase-retrieval Algorithms for a Complicated Optical System," Appl. Opt. 32, 1737-1746 (1993).