Structural and optical evaluation of WOxNy films deposited by reactive magnetron sputtering

Journal of Physics and Chemistry of Solids

Volumn 68, Issue 12, 2007, Pages 2227-2232

  Mohamed, S H ^a,b,c   Anders, André ^a   Montero, I ^b   Galan L ^d  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^c Sohag University   (Egypt)

^d UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

A. Thin films; B. Plasma deposition; C. X ray diffraction; D. Optical properties

Indexed keywords

ENERGY DISPERSIVE X RAY ANALYSIS; LIGHT ABSORPTION; MAGNETRON SPUTTERING; OPTICAL BAND GAPS; PARTIAL PRESSURE; PLASMA DEPOSITION; REFRACTIVE INDEX; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION;

COORDINATION NUMBERS; REACTIVE GAS PARTIAL PRESSURES RATIOS; SWANEPOEL'S METHODS; TUNGSTEN OXYNITRIDES;

THIN FILMS;

EID: 36248947219     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2007.06.005     Document Type: Article

References (15)

1. Banakh O., Steinmann P.-A., and Dumitrescu-Buforn L. Thin Solid Films 513 (2006) 136
2. Wong M.-S., Chou H.P., and Yang T.-S. Thin Solid Films 494 (2006) 244
3. Parreira N.M.G., Carvalho N.J.M., Vaz F., and Cavaleiro A. Surf. Coat. Technol. 200 (2006) 6511
4. Mohamed S.H., and Anders A. Surf. Coat. Technol. 201 (2006) 2977
5. Cho D.-H., Chang T.-S., and Shin C.-H. Catal. Lett. 67 (2000) 163
6. Diot N., Larcher O., Marchand R., Kempf J.Y., and Macaudiere P. J. Alloys Compd. 323-324 (2001) 45
7. S. Yang, A.K. Vishnu, US Patent 7002202, 2006.
8. Mohamed S.H., Kappertz O., Ngaruiya J.M., Niemeier T., Drese R., Detemple R., Wakkad M.M., and Wuttig M. Phys. Status Solidi (a) 201 (2004) 90
9. Di Valentin C., Pacchioni G., and Selloni A. Phys. Rev. B 70 (2004) 085116
10. Swanepoel R. J. Phys. E: Sci. Instrum. 16 (1983) 1214
11. Shaaban E.R., El-Kabnay N., Abou-sehly A.M., and Afify N. Phys. B: Condens. Matter 381 (2006) 24
12. Ohring M. The Material Science of Thin Films (1991), Academic Press, San Diego
13. Wemple S.H., and DiDomenico W. Phys. Rev. B 3 (1971) 1338
14. Wemple S.H. Phys. Rev. B 7 (1973) 3767
15. Tanaka K. Thin Solid Films 66 (1980) 271