Real-time trace ambient ammonia monitor for haze prevention

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6607, Issue PART 2, 2007, Pages

  Nishimura, Katsumi ^a   Sakaguchi, Yuhei ^a   Crosson, Eric ^b   Wahl, Edward ^b   Rella, Chris ^b  

^a HORIBA LTD   (Japan)

^b PICARRO INC   (United States)

Author keywords

Ammonia; CRDS; Haze; Ion chromatography; Photolithography; Trace gas monitor

Indexed keywords

AMMONIA; INTEGRATED CIRCUITS; ION CHROMATOGRAPHY; MICROPROCESSOR CHIPS; REAL TIME SYSTEMS;

AIRBORNE CONTAMINATION; DEEP ULTRA-VIOLET OPTICS; HAZE PREVENTION; OPTICAL SURFACES; TRACE GAS MONITOR;

PHOTOLITHOGRAPHY;

EID: 36248945519     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.728981     Document Type: Conference Paper

References (0)