Thin film thickness measurement by double laser interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6616, Issue PART 2, 2007, Pages

  Domingo, M ^a   Millan C ^a   Satorre, M A ^a   Canto J ^a  

^a UNIVERSITAT POLITÈCNICA DE VALÈNCIA   (Spain)

Author keywords

Density; QCMB; Refractive index; Thickness

Indexed keywords

FILM THICKNESS; LASER INTERFEROMETRY; PARTIAL PRESSURE; REFLECTION; REFRACTIVE INDEX;

ACCRETIONS; DOUBLE LASER INTERFEROMETRIC TECHNIQUE; INTERFEROMETRIC PATTERNS; VACUUM CHAMBERS;

THIN FILMS;

EID: 36248936090     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726183     Document Type: Conference Paper

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