Detection of intrinsic stress in cubic boron nitride films by x-ray absorption near-edge structure: Stress relaxation mechanisms by simultaneous ion implantation during growth

Physical Review B - Condensed Matter and Materials Physics

Volumn 76, Issue 17, 2007, Pages

  Gago, R ^a   Abendroth, B ^b   Cerda J I ^c   Jimenez I ^c   Moller W ^b  

^a CENTRO DE MICROANÁLISIS DE MATERIALES   (Spain)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36248934106     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.76.174111     Document Type: Article

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