Electrical characteristics and electron heating mechanism of an inductively coupled argon discharge

Plasma Sources Science and Technology

Volumn 3, Issue 2, 1994, Pages 169-176

  Godyak, V A ^a   Piejak, R B ^a   Alexandrovich, B M ^a  

^a OSRAM SYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36149028331     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/3/2/007     Document Type: Article

References (12)

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