Application of the NEPSAC nonlinear predictive control strategy to a semiconductor reactor

Lecture Notes in Control and Information Sciences

Volumn 358, Issue 1, 2007, Pages 503-512

  De Keyser, Robin ^a   Donald III, James ^b  

^a GHENT UNIVERSITY   (Belgium)

^b ASMA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CONTROL EQUIPMENT; DEPOSITION; FLEXIBLE ELECTRONICS; HEATING; MIMO SYSTEMS; MODEL PREDICTIVE CONTROL; MULTIPLEXING EQUIPMENT; NONLINEAR SYSTEMS; PREDICTIVE CONTROL SYSTEMS; RAPID THERMAL PROCESSING; VAPOR DEPOSITION;

HIGH-TEMPERATURE PROCESSING; INTEGRATED CIRCUIT FABRICATION; MULTI INPUT MULTI OUTPUT SYSTEMS; NONLINEAR PREDICTIVE CONTROL; RAPID THERMAL CHEMICAL VAPOR DEPOSITIONS; SINGLE WAFER PROCESSING; TECHNICAL DIFFICULTIES; TEMPERATURE UNIFORMITY;

SILICON WAFERS;

EID: 36148998064     PISSN: 01708643     EISSN: None     Source Type: Book Series    
DOI: 10.1007/978-3-540-72699-9_42     Document Type: Article

References (7)

1. Allgöwer, F., Zheng, A. (Eds.), "Nonlinear Predictive Control", Birkhauser Verlag Basel, (2000).
2. De Keyser, R., Van Cauwenberghe, A., "A Self-Tuning Multistep Predictor Application", Automatica, 17, 167-174,(1981).
3. De Keyser, R., Van Cauwenberghe, A., "Extended Prediction Self-Adaptive Control", IFAC Symposium on Identification, Pergamon Press Oxford, 1255-1260, (1985).
4. De Keyser, R., Ionescu, C., "The disturbance model in model based predictive control", IEEE Conf. on Control Application, paper 001472, (2003).
5. De Keyser, R., "Model Based Predictive Control for Linear Systems", UNESCO Encyclopaedia of Life Support Systems, Article contribution 6.43.16.1, Eolss Publishers Co Ltd, Oxford, ISBN 0 9542 989 18-26-34 (www.eolss.net), 30p, (2003).
6. Kailath, T., Schaper, C., Clio, Y., Gyugyi, P. , Norman, S., Park,P., Boyd, S., Franklin, G., Saraswat, K., Moslehi, M., Davis, C., "Control for Advanced Semiconductor Device Manufacturing: A Case History", In: William S. Levine (Ed.), "The Control Handbook", CRC-press, IEEE-press, (1996).
7. Rueda, A., Cristea, S., De Prada, C., De Keyser, R., "Nonlinear Predictive Control of a Distillation Column", IEEE CDC-ECC Joint Int. Conf., 5156-5161, (2005).