High sensitivity permeation measurement system for "ultrabarrier" thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 6, 2007, Pages 1587-1593

  Zhang, Xiao Dong ^a   Lewis, Jay S ^b   Wolter, Scott D ^a   Parker, Charles B ^a   Glass, Jeffrey T ^a  

^a Duke University   (United States)

^b RTI INTERNATIONAL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMERCIAL INSTRUMENTS; GAS PERMEATION; RESIDUAL GAS ANALYZERS; ULTRABARRIER COATINGS;

MASS SPECTROMETRY; OXYGEN; PARTIAL PRESSURE; POLYMER FILMS; ULTRAHIGH VACUUM; WATER VAPOR;

THIN FILMS;

EID: 36148945678     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2794075     Document Type: Article

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