Radiotracer study of cobalt diffusion and solubility in electronic-grade germanium wafers

Physica B: Condensed Matter

Volumn 401-402, Issue , 2007, Pages 214-217

  Lerner, L ^a   Stolwijk, N A ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

Cobalt; Diffusion; Germanium; Solubility; Vacancy

Indexed keywords

CONTAMINATION; DIFFUSION; ERROR ANALYSIS; GERMANIUM COMPOUNDS; SOLUBILITY; VACANCIES;

ACCEPTOR ACTIVITY; ELECTRONIC DEVICES; RADIOTRACER;

COBALT COMPOUNDS;

EID: 36049047367     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physb.2007.08.149     Document Type: Article

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