Acoustic laser cleaning of silicon surfaces

Applied Physics A: Materials Science and Processing

Volumn 89, Issue 1, 2007, Pages 109-113

  Geldhauser, T ^a   Ziese, F ^a   Merkt, F ^a   Erbe, A ^a   Boneberg, J ^a   Leiderer, P ^a  

^a UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; CLEANING; ELASTIC DEFORMATION; ELONGATION; LASER APPLICATIONS;

ACOUSTIC LASER CLEANING; NANOMECHANICAL DETACHMENT PROCESS; SILICON SURFACES; SUBMICRON REGIME;

SILICON;

EID: 36049031502     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-007-4190-7     Document Type: Article

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