Factors affecting the reproducibility of the accommodation coefficient of jhe spinning rotor gauge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 6, 2007, Pages 1567-1576

  Chang, Ren Fang ^a   Abbott, Patrick J ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCOMMODATION COEFFICIENT; REPRODUCIBILITY; ROTOR GAUGES;

ANISOTROPY; CALIBRATION; PRESSURE EFFECTS; ROTORS;

GAGES;

EID: 36048995024     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2790910     Document Type: Article

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