Usefulness of substrate cleaning with carbon dioxide for organic electronic devices

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 46, Issue 36-40, 2007, Pages

  Susukida, Makoto ^a   Kamei, Masayuki ^b   Tarezoe, Hideo ^a   Ishirawa, Ken ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Link Star Japan Co Ltd   (Japan)

Author keywords

CO2 cleaning; OFET; OLED; Organic electronic device; Substrate cleaning; UV ozone cleaning

Indexed keywords

CARBON DIOXIDE; CONTACT ANGLE; FIELD EFFECT TRANSISTORS; GRAIN SIZE AND SHAPE; ORGANIC LIGHT EMITTING DIODES (OLED); SUBSTRATES;

CO2 CLEANING; ORGANIC ELECTRONIC DEVICES; SUBSTRATE CLEANING; UV-OZONE CLEANING;

CHEMICAL CLEANING;

EID: 36048969700     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.L910     Document Type: Article

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