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Volumn 17, Issue 9, 2007, Pages 1853-1862

Closed-form expressions for pull-in parameters of two-degree-of-freedom torsional microactuators

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS;

EID: 35648994387     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/9/014     Document Type: Conference Paper
Times cited : (16)

References (14)
  • 5
    • 0036474936 scopus 로고    scopus 로고
    • Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions
    • Degani O and Nemirovsky Y 2002 Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions J. Microelectromech. Syst. 11 20-6
    • (2002) J. Microelectromech. Syst. , vol.11 , Issue.1 , pp. 20-26
    • Degani, O.1    Nemirovsky, Y.2
  • 6
    • 1642340602 scopus 로고    scopus 로고
    • Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver
    • Degani O and Nemirovsky Y 2004 Experimental verification of a design methodology for torsion actuators based on a rapid pull-in solver J. Microelectromech. Syst. 13 121-30
    • (2004) J. Microelectromech. Syst. , vol.13 , Issue.1 , pp. 121-130
    • Degani, O.1    Nemirovsky, Y.2
  • 7
    • 4243103784 scopus 로고    scopus 로고
    • An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors
    • Huang J-M, Liu A Q, Deng Z L, Zhang Q X, Ahn J and Asundi A 2004 An approach to the coupling effect between torsion and bending for electrostatic torsional micromirrors Sensors Actuators A 115 159-67
    • (2004) Sensors Actuators , vol.115 , pp. 159-167
    • Huang, J.-M.1    Liu, A.Q.2    Deng, Z.L.3    Zhang, Q.X.4    Ahn, J.5    Asundi, A.6
  • 8
    • 0032594981 scopus 로고    scopus 로고
    • Speed-energy optimization of electrostatic actuators based on pull-in
    • Castaner L M and Senturia S D 1999 Speed-energy optimization of electrostatic actuators based on pull-in J. Microelectromech. Syst. 8 290-8
    • (1999) J. Microelectromech. Syst. , vol.8 , Issue.3 , pp. 290-298
    • Castaner, L.M.1    Senturia, S.D.2
  • 9
    • 0032594977 scopus 로고    scopus 로고
    • Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs
    • Hung E S and Senturia S D 1999 Generating efficient dynamical models for microelectromechanical systems from a few finite-element simulation runs J. Microelectromech. Syst. 8 280-9
    • (1999) J. Microelectromech. Syst. , vol.8 , Issue.3 , pp. 280-289
    • Hung, E.S.1    Senturia, S.D.2
  • 10
    • 33846518232 scopus 로고    scopus 로고
    • Closed-form solutions of the parallel plate problem
    • Lee Ki B 2007 Closed-form solutions of the parallel plate problem Sensors Actuators A 133 518-25
    • (2007) Sensors Actuators , vol.133 , Issue.2 , pp. 518-525
    • Lee Ki, B.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.