Integrated readout and control electronics for a microelectromechanical angular velocity sensor

ESSCIRC 2006 - Proceedings of the 32nd European Solid-State Circuits Conference

Volumn , Issue , 2006, Pages 243-246

  Saukoski, Mikko ^a   Aaltonen, Lasse ^a   Halonen, Kari ^a   Salo, Teemu ^b  

^a AALTO UNIVERSITY   (Finland)

^b VTI Technologies Oy   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED READOUT; MICROMACHINED CAPACITIVE GYROSCOPE; SUBSYSTEMS;

ANGULAR VELOCITY; APPLICATION SPECIFIC INTEGRATED CIRCUITS; ELECTRONIC EQUIPMENT; FIELD PROGRAMMABLE GATE ARRAYS (FPGA); GYROSCOPES; MICROELECTROMECHANICAL DEVICES; SENSORS; SIGNAL TO NOISE RATIO;

READOUT SYSTEMS;

EID: 35648989666     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSCIR.2006.307576     Document Type: Conference Paper

References (13)