Contact angles and liquid loss behavior of high index fluids

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6533, Issue , 2007, Pages

  Harder, Paul M ^a   Shedd, Timothy A ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT ANGLE; DEFECTS; FLOW VELOCITY; MICROPROCESSOR CHIPS;

HIGH INDEX FLUIDS; IMMERSION LITHOGRAPHY; NUMERICAL APERTURE; SCANNING SPEEDS;

LITHOGRAPHY;

EID: 35648979940     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.734338     Document Type: Conference Paper

References (2)

1. T. Shedd, S. Schuetter, G. Nellis, and C. V. Peski, Proceedings of SPIE 6349 (2006).
2. P. deGennes, F. Brochard-Wyart, and D. Quere, Capillarity and Wetting Phenomena (Springer, New York, 2002).