Simulations of a non-planar lithography and of performance characteristics of arcade microthermopiles for energy scavenging

Collection of Technical Papers - 5th International Energy Conversion Engineering Conference

Volumn 2, Issue , 2007, Pages 706-720

  Leonov, Vladimir ^a,e   Wang, Ziyang ^a,b,e,f   Pellens, Rudy ^c,g   Gui, Cheng Qun ^c,g   Vullers, Ruud J M ^d,h   Su, Jiale ^d,h  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

^c ASML   (Netherlands)

^d HOLST CENTRE   (Netherlands)

^e Integrated Systems Associated Department   (Belgium)

^f Katholieke Universiteit Leuven   (Belgium)

^g Business Unit 200Mm/sa   (Netherlands)

^h Wireless Autonomous Transducer Solutions   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COST EFFECTIVENESS; ENERGY CONSERVATION; LITHOGRAPHY; MEMS; WASTE HEAT;

ENERGY SCAVENGING; MICROTHERMOPILES; POWER AUTONOMOUS DEVICES;

THERMOPILES;

EID: 35648975482     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2007-4782     Document Type: Conference Paper

References (13)

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