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Volumn , Issue , 2005, Pages 355-361
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Inertial effects in surface and bulk elastic waves and possibility of their use in high-G solid-state micro gyroscopes
a a b,c |
Author keywords
Bragg's grating; Bulk and surface acoustic waves (BAW; Effect of polarization plane rotation of shear elastic waves; Effect of variation of velocity of elastic waves; High G micro gyro; Interferometer; MEMS; Micromechanics; Resonator; SAW); Solid State Gyroscopy
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC WAVES;
ACOUSTICS;
GYROSCOPES;
INTERFEROMETERS;
MEMS;
MICROMECHANICS;
NAVIGATION SYSTEMS;
POLARIZATION;
QUARTZ;
RESONATORS;
SAWING;
SIGNAL PROCESSING;
ULTRASONIC TRANSDUCERS;
BRAGG'S GRATING;
BULK AND SURFACE ACOUSTIC WAVES;
HIGH-G MICRO GYRO;
INTERDIGITAL TRANSDUCER;
MICRO-ELECTRO-MECHANICAL;
PERFORMANCE SPECIFICATIONS;
POLARIZATION PARAMETERS;
SHEAR ELASTIC WAVES;
SHEAR FLOW;
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EID: 35648966569
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (7)
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References (4)
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