Profile simulation and fabrication of gold nanostructures by separated nanospheres with oblique deposition and perpendicular etching

Plasmonics

Volumn 2, Issue 4, 2007, Pages 217-230

  Zhou, Xiaodong ^a   Virasawmy, Selven ^b   Knoll, Wolfgang ^a   Liu, Kai Yu ^c   Tse, Man Siu ^c   Yen, Li Wei ^a  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Angle deposition; Nanosphere lithography; Nanostructure; Numerical simulation

Indexed keywords

EID: 35548956870     PISSN: 15571955     EISSN: 15571963     Source Type: Journal    
DOI: 10.1007/s11468-007-9040-0     Document Type: Article

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