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Volumn 47, Issue 12, 2007, Pages 2109-2113

Low frequency noise in nMOSFETs with subnanometer EOT hafnium-based gate dielectrics

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; DRAIN CURRENT; ELECTRIC POTENTIAL; INTERFACES (MATERIALS); MOSFET DEVICES;

EID: 35548942186     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2006.11.001     Document Type: Article
Times cited : (2)

References (16)
  • 1
    • 85059712075 scopus 로고    scopus 로고
    • Houssa M. (Ed), IOP, London
    • In: Houssa M. (Ed). High-k gate dielectrics (2003), IOP, London
    • (2003) High-k gate dielectrics
  • 3
    • 0028550128 scopus 로고
    • 1/f noise sources
    • Hooge F.N. 1/f noise sources. IEEE Trans Electr Dev 41 11 (1994) 1926-1935
    • (1994) IEEE Trans Electr Dev , vol.41 , Issue.11 , pp. 1926-1935
    • Hooge, F.N.1
  • 4
    • 0024732795 scopus 로고
    • A 1/f noise technique to extract the oxide trap density near the conduction band edge of silicon
    • Jayaraman R., and Sodini C.G. A 1/f noise technique to extract the oxide trap density near the conduction band edge of silicon. IEEE Trans Electr Dev 36 9 (1989) 1773-1782
    • (1989) IEEE Trans Electr Dev , vol.36 , Issue.9 , pp. 1773-1782
    • Jayaraman, R.1    Sodini, C.G.2
  • 5
    • 0025398785 scopus 로고
    • A unified model for the flicker noise in metal-oxide-semiconductor field-effect transistors
    • Hung K.K., Ko P.K., Hu C., and Cheng Y.C. A unified model for the flicker noise in metal-oxide-semiconductor field-effect transistors. IEEE Trans Electr Dev 37 3 (1990) 654-665
    • (1990) IEEE Trans Electr Dev , vol.37 , Issue.3 , pp. 654-665
    • Hung, K.K.1    Ko, P.K.2    Hu, C.3    Cheng, Y.C.4
  • 6
    • 0034317664 scopus 로고    scopus 로고
    • Critical discussion on unified 1/f noise models for MOSFETs
    • Vandamme E.P., and Vandamme L.K.J. Critical discussion on unified 1/f noise models for MOSFETs. IEEE Trans Electr Dev 47 11 (2000) 2146-2152
    • (2000) IEEE Trans Electr Dev , vol.47 , Issue.11 , pp. 2146-2152
    • Vandamme, E.P.1    Vandamme, L.K.J.2
  • 8
    • 0142185218 scopus 로고    scopus 로고
    • Comprehensive noise performance of ultrathin oxide MOSFETs at low frequencies
    • Lee J., and Bosman G. Comprehensive noise performance of ultrathin oxide MOSFETs at low frequencies. Solid-State Electron 48 (2004) 61-71
    • (2004) Solid-State Electron , vol.48 , pp. 61-71
    • Lee, J.1    Bosman, G.2
  • 9
    • 0026144142 scopus 로고
    • Improved analysis of low frequency noise in field-effect MOS transistors
    • Ghibaudo G., Roux O., Nguyen-Duc C., Balestra F., and Brini J. Improved analysis of low frequency noise in field-effect MOS transistors. Phys Stat Sol A 124 (1991) 571-581
    • (1991) Phys Stat Sol A , vol.124 , pp. 571-581
    • Ghibaudo, G.1    Roux, O.2    Nguyen-Duc, C.3    Balestra, F.4    Brini, J.5
  • 10
    • 19944369438 scopus 로고    scopus 로고
    • Oxide traps characterization of 45 nm MOS transistors by gate current R.T.S. noise measurements
    • Martinez F., Leyris C., Neau G., Valenza M., Hoffmann A., Vildeuil J.C., et al. Oxide traps characterization of 45 nm MOS transistors by gate current R.T.S. noise measurements. Microelectron Eng 80 (2005) 54-57
    • (2005) Microelectron Eng , vol.80 , pp. 54-57
    • Martinez, F.1    Leyris, C.2    Neau, G.3    Valenza, M.4    Hoffmann, A.5    Vildeuil, J.C.6
  • 11
    • 0012278046 scopus 로고
    • Noise in solid-state microstructures: a new perspective on individual defects, interface states, and low-frequency noise
    • Kirton M.J., and Uren M.J. Noise in solid-state microstructures: a new perspective on individual defects, interface states, and low-frequency noise. Adv Phys 38 4 (1989) 367-468
    • (1989) Adv Phys , vol.38 , Issue.4 , pp. 367-468
    • Kirton, M.J.1    Uren, M.J.2
  • 12
    • 33645798318 scopus 로고    scopus 로고
    • A comparative study of drain and gate low frequency noise in nMOSFETs with hafnium based gate dielectrics
    • Giusi G., Crupi F., Pace C., Ciofi C., and Groeseneken G. A comparative study of drain and gate low frequency noise in nMOSFETs with hafnium based gate dielectrics. IEEE Trans Electr Dev 53 4 (2006) 823-828
    • (2006) IEEE Trans Electr Dev , vol.53 , Issue.4 , pp. 823-828
    • Giusi, G.1    Crupi, F.2    Pace, C.3    Ciofi, C.4    Groeseneken, G.5
  • 13
    • 33751121032 scopus 로고    scopus 로고
    • 2 stack, IRPS, Phoenix; 2004. p. 181-7.
  • 14
    • 33846097898 scopus 로고    scopus 로고
    • Giusi G, Crupi F, Ciofi C, Pace C. Instrumentation design for gate and drain low frequency noise measurements. In: IMTC conference proceedings; 2006. p. 1747-50.
  • 15
    • 35548999866 scopus 로고    scopus 로고
    • Ragnarsson L-Å, Tsai W, Kerber A, Chen PJ, Cartier E, Pantisano L, De Gendt S, Heyns M. Mobility in high-k dielectric based field effect transistors, SSDM; 2003. p. 46-7.
  • 16
    • 0842288289 scopus 로고    scopus 로고
    • 2 on the device performance of high-k based transistors, IEDM Tech Dig; 2003. p. 87-90.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.