High throughput scribing for the manufacture of LED components

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5366, Issue , 2004, Pages 207-211

  Karnakis, D ^a   Illy, E K ^a   Knowles, M R H ^a   Gu, E ^b   Dawson, M D ^b  

^a OXFORD LASERS LTD   (United Kingdom)

^b UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

Gallium nitride; Laser scribing; LED; Micromachining; Sapphire; UV lasers

Indexed keywords

ABSORPTION; GALLIUM NITRIDE; HARMONIC ANALYSIS; LASER PULSES; LASERS; MICROMACHINING; SAPPHIRE; SUBSTRATES; VACUUM; WSI CIRCUITS;

GAN; LASER SCRIBING; UV LASERS; WHITE LIGHT EMITTING DIODES;

LIGHT EMITTING DIODES;

EID: 3543138232     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.531685     Document Type: Conference Paper

References (0)