Estimation of ultra-shallow plasma doping (PD) layer's optical absorption properties by spectroscopic ellipsometry (SE)

Extended Abstracts of the Fourth International Workshop on Junction Technology, IWJT 2004

Volumn 4, Issue , 2004, Pages 102-103

  Jin, G G ^a   Sasaki, Y ^a   Tsutsui, K ^b   Tamura, H ^a   Mizuno, B ^a   Higaki, R ^b   Satoh, T ^b   Majima, K ^b   Sauddin, H ^b   Takagi, K ^b   Ohmi, S ^b   Iwai, H ^b  

^a Ultimate Junction Technologies Inc ^*  (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; ELLIPSOMETRY; ION BOMBARDMENT; IONIZATION; MATHEMATICAL MODELS; SPECTROSCOPIC ANALYSIS;

HELICON WAVE PLASMAS; PLASMA DOPING (PD); SPECTROSCOPIC ELLIPSOMETRY (SE); SURFACE THIN LAYERS;

LIGHT ABSORPTION;

EID: 3543134897     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Conference Paper

References (4)

1. A. Hori and B. Mizuno, Tech, Dig. of IEDM, (1999) p.641.
2. T. Ito, K. Suguro, M. Tamura, T. Taniguchi, Y. Ushiku, T. Iinuma, T. Itani, M. Yoshioka, T. Owada, Y. Imaoka, H. Murayama, and T. Kusuda, Ext. Abs. IWJT, (2002) p. 23.
3. Y. Z. Hu, P. P. Buaud, Y. Wang, L. Spanos and E. A. Irene, Appl. Phys. Lett. 64 (1994) p.1233.
4. Y. Sasaki, B. Mizuno, S. Akama, R. Higaki, K. Tsutsui, S. Ohomi, and H. Iwai, Ext. Abs. IWJT, (2002) p. 37.