Scribing of GaN wafer for white LED by water jet guided laser

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5366, Issue , 2004, Pages 200-206

  Nilsson, T ^a   Wagner, F ^a   Housh, R ^a   Richerzhagen, B ^a  

^a Synova SA   (Switzerland)

Author keywords

GaN; Grooving; Laser cutting; LED; Scribing; Water jet

Indexed keywords

CRACK INITIATION; DELAMINATION; ETCHING; JETS; LASER PULSES; LASERS; LIGHT EMITTING DIODES; NOZZLES; REFLECTION; WSI CIRCUITS;

GAN; GROOVING; LASER CUTTING; SCRIBING; WATER-JET;

GALLIUM NITRIDE;

EID: 3543098557     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529012     Document Type: Conference Paper

References (0)