Development of silicon-on-insulator waveguide technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5355, Issue , 2004, Pages 81-95

  Aalto, Timo ^a   Harjanne, Mikko ^b   Kapulainen, Markku ^a   Heimala, Päivi ^a   Leppihalme, Matti ^a,b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Birefringence; Polarization; Polarization extinction ratio; Ridge waveguide; Silicon on insulator; SOI; Thermo optical switch; Waveguide

Indexed keywords

BIREFRINGENCE; CLADDING (COATING); ELECTRIC FIELDS; MICROMETERS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; POLARIZATION; SCATTERING; SILICON ON INSULATOR TECHNOLOGY; THERMAL CONDUCTIVITY; WAVEGUIDES;

POLARIZATION EXTINCTION RATIO; RIDGE WAVEGUIDES; THERMO-OPTICAL SWITCHES; WAVELENGTH MULTIPLEXERS;

OPTICAL WAVEGUIDES;

EID: 3543091482     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.537540     Document Type: Conference Paper

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