Determination of anisotropic film thickness, complex reflective indices, and their dispersion from reflectance spectra

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3094, Issue , 1997, Pages 349-353

  Filippov, Valery N ^a   Kutavichus, Vitaly P ^a  

^a B I STEPANOV INSTITUTE OF PHYSICS   (Belarus)

Author keywords

Method of envelopes; Optical constants; Reflectance spectra; Uniaxial absorbing films

Indexed keywords

ELLIPSOMETRY; OPTICAL CONSTANTS; POLARIMETERS;

COMPLEX DIELECTRIC CONSTANTS; FILM INTERFACES; HIGH STABILITY; METHOD OF ENVELOPES; NUMERICAL MODELLING; REFLECTANCE MEASUREMENTS; REFLECTANCE SPECTRA; UNIAXIAL ABSORBING FILMS;

REFLECTION;

EID: 3543023556     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271838     Document Type: Conference Paper

References (11)

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