Voltage-induction type electrostatic film motor driven by two- to four-phase ac voltage and electrostatic induction

Sensors and Actuators, A: Physical

Volumn 140, Issue 2, 2007, Pages 239-250

  Yamashita, Norio ^a   Zhang, Zu Guang ^a   Yamamoto, Akio ^a   Gondo, Masahiko ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Electrostatic actuator; Electrostatic induction; Film actuator; Flexible printed circuit; Synchronous motor

Indexed keywords

ELECTRIC POTENTIAL; ELECTRIC POWER DISTRIBUTION; ELECTRIC WIRE; ELECTRODES; ELECTROSTATIC ACTUATORS;

ELECTROSTATIC INDUCTION; ELECTROSTATIC MOTOR; FILM ACTUATOR; FLEXIBLE PRINTED CIRCUIT; SYNCHRONOUS MOTOR;

INDUCTION MOTORS;

EID: 35349019705     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.07.007     Document Type: Article

References (26)

1. Yamashita H., Nozue H., Nomura E., Itoh K., Ema T., Hirasawa S., Kojima K., Tamura T., and Nakajima K. Recent progress in electron-beam cell projection technology. Jpn. J. Appl. Phys. 1: Regul. Pap. Short Notes Rev. Pap. (Japan) 35 12B (1996) 6404-6414
2. Chinzei K., Kikinis R., and Jolesz F. Mr compatibility of mechatronic devices: design criteria. Proceedings of the Medical Image Computing and Computer-Assisted Intervention (1999) 1020-1030
3. Delson N., Hanak T., Loewke K., and Miller D. Modeling and implementation of mckibben actuators for a hopping robot. Proceedings of the 12th International Conference on Advanced Robotics (2005) 833-840
4. R. Moser, R. Gassert, E. Burdet, L. Sache, H. Woodtli, J. Erni, W. Maeder, H. Bleuler, An mr compatible robot technology, in: Proceedings of the IEEE ICRA, vol. 1, 2003, pp. 670-675.
5. M. Flueckiger, M. Bullo, D. Chapuis, R. Gassert, Y. Perriard, fmri compatible haptic interface actuated with traveling wave ultrasonic motor, in: Record of IEEE Industry Applications Conference, vol. 3, 2005, pp. 2075-2082.
6. Reynaerts D., and Van Brussel H. Design aspects of shape memory actuators. Mechatronics 8 6 (1998) 635-656
7. Guo S., Fukuda T., and Asaka K. A new type of fish-like underwater microrobot. IEEE/ASME Trans. Mechatron. 8 1 (2003) 136-141
8. Egawa S., Niino T., and Higuchi T. Film actuators: planar, electrostatic surface-drive actuators. Proceedings of the IEEE MEMS (1991) 9-14
9. Niino T., Egawa S., and Higuchi T. High-power and high-efficiency electrostatic actuator. Proceedings of the IEEE MEMS (1993) 236-241
10. Fan L.-S., Tai Y.-C., and Muller R.S. Ic-processed electrostatic micromotors. Sens. Actuators 20 1/2 (1989) 41-47
11. Tai Y.-C., and Muller R.S. Ic-processed electrostatic synchronous micromotors. Sens. Actuators 20 1/2 (1989) 49-55
12. Tang W., Tu-Cuong H., Nguyen R., and Howe. Laterally driven polysilicon resonant microstructures. Sens. Actuators 20 1/2 (1989) 25-32
13. Jacobsen S., Price R., Wood J., Rytting T., and Rafaelof M. The wobble motor: an electrostatic, planetary-armature, microactuator. Microelectro Mechanical Systems, Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'. IEEE (1989) 17-24
14. Deng K., and Mehregany M. Outer-rotor polysilicon wobble micromotors. Sens. Actuators A (Phys.) A64 3 (1998) 265-271
15. Akiyama T., and Shono K. Controlled stepwise motion in polysilicon microstructures. J. Microelectromech. Syst. 2 3 (1993) 106-110
16. Minotti P., Bourbon G., Langlet P., and Masuzawa T. Toward new cylindrical electrostatic micromotors using tubular combination of arrayed direct-drive actuators. Jpn. J. Appl. Phys., Part 2 (Lett.) 37 5B (1998) 622-625
17. Fujita H., and Toshiyoshi H. Microactuators and their applications. Microelectron. J. 29 9 (1998) 637-640
18. Lee C., Lai Y.-J., Wu C.-Y., Lin Y.-S., Tasi M.H., Huang R.-S., and Lin M.-S. Scratch drive actuator driven self-assembled variable optical attenuator. Jpn. J. Appl. Phys., Part 1 (Reg. Pap. Short Notes & Rev. Pap.) 43 6B (2004) 3906-3909
19. Donald B., Levey C., McGray C., Paprotny I., and Rus D. An untethered, electrostatic, globally controllable mems micro-robot. J. Microelectromech. Syst. 15 1 (2006) 1-15
20. Yeh R., Hollar S., and Pister K. Single mask, large force, and large displacement electrostatic linear inchworm motors. J. Microelectromech. Syst. 11 4 (2002) 330-336
21. E. Sarajlic, E. Berenschot, N. Tas, H. Fujita, G. Krijnen, M. Elwenspoek, High performance bidirectional electrostatic inchworm motor fabricated by trench isolation technology, in: TRANSDUCERS '05. Proceedings of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (IEEE Cat. No. 05TH8791), vol. 1, IEEE, Seoul, South Korea, 2005, pp. 53-56.
22. Niino T., Egawa S., Nishiguchi N., and Higuchi T. Development of an electrostatic actuator exceeding 10n propulsive force. Proceedings of the IEEE MEMS (1992) 122-127
23. A. Yamamoto, H. Yasui, N. Shimizu, T. Higuchi, Development of electrostatic levitation motor for vacuum condition, in: Proceedings of the IEEE International Symposium on Industrial Electronics, vol. 2, 2003, pp. 934-939.
24. Yamamoto A., Hirano Y., Ichiyanagi K., and Higuchi T. Development of a 1-dof haptic device using an electrostatic film motor for fmri studies. Proceedings of the 2006 IEEE International Conference on Robotics and Automation (2006) 4378-4380
25. Yamamoto A., Niino T., and Higuchi T. Modeling and identification of an electrostatic motor. Precis. Eng. 30 1 (2006) 104-113
26. Yamamoto A., Yoshioka H., and Higuchi T. A 2-dof electrostatic sheet conveyer using wire mesh for desktop automation. Robotics and Automation, 2006. ICRA 2006. Proceedings of the 2006 IEEE International Conference (2006) 2208-2213