Depth sectioning in scanning transmission electron microscopy based on core-loss spectroscopy

Ultramicroscopy

Volumn 108, Issue 1, 2007, Pages 17-28

  D'Alfonso, A J ^a   Findlay, S D ^a   Oxley, M P ^b   Pennycook, S J ^b   van Benthem, K ^b   Allen, L J ^a  

^a UNIVERSITY OF MELBOURNE   (Australia)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Depth sectioning; Electron energy loss spectroscopy; Nonlocality; STEM

Indexed keywords

CONFOCAL MICROSCOPY; ELECTRON ENERGY LOSS SPECTROSCOPY; PROBES; SCANNING;

CONFOCAL SCANNING OPTICAL MICROSCOPES; CORE LOSS SPECTROSCOPY; CRYSTALLINE MATRIX; DEPTH SECTIONING SAMPLES; DOPANT ATOMS;

TRANSMISSION ELECTRON MICROSCOPY;

ARTICLE; CONFOCAL MICROSCOPY; ELECTRON ENERGY LOSS SPECTROSCOPY; IMAGE ANALYSIS; IMAGE DISPLAY; IONIZATION; MATHEMATICAL COMPUTING; MECHANICAL PROBE; SCANNING TRANSMISSION ELECTRON MICROSCOPY;

EID: 35348957382     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2007.02.026     Document Type: Article

References (33)

1. Varela M., Lupini A.R., van Benthem K., Borisevich A.Y., Chisholm M.F., Shibata N., Abe E., and Pennycook S.J. Annu. Rev. Mater. Res. 35 (2005) 539
2. Packan P.A. Science 285 (1999) 2079
3. Van de Walle C.G. Phys. Rev. Lett. 85 (2000) 1012
4. Shibata N., Pennycook S.J., Gosnell T.R., Painter G.S., Shelton W.A., and Becher P.F. Nature 428 (2004) 730
5. Wang S., Borisevich A.Y., Rashkeev S.N., Glazoff M.V., Sohlberg K., Pennycook S.J., and Pantelides S.T. Nature Mater. 3 (2004) 143
6. Borisevich A.Y., Lupini A.R., and Pennycook S.J. Proc. Nat. Acad. Sci. 103 (2006) 3044
7. van Benthem K., Lupini A.R., Kim M., Suck Baik H., Doh S.J., Lee J., Oxley M.P., Findlay S.D., Allen L.J., Luck J.T., and Pennycook S.J. Appl. Phys. Lett. 87 (2005) 34104
8. Einspahr J.J., and Voyles P.M. Ultramicroscopy 106 (2006) 1041
9. Frigo S.P., Levine Z.H., and Zaluzec N.J. Appl. Phys. Lett. 81 (2002) 2112
10. Krivanek O.L., Dellby N., and Lupini A.R. Ultramicroscopy 78 (1999) 1
11. Batson P.E., Dellby N., and Krivanek O.L. Nature 418 (2002) 617
12. Voyles P.M., Grazul J.L., and Muller D.A. Ultramicroscopy 96 (2003) 251
13. Voyles P.M., Muller D.A., and Kirkland E.J. Microsc. Microanal. 10 (2004) 219
14. Borisevich A.Y., Lupini A.R., Travaglini S., and Pennycook S.J. J. Electron Microsc. 55 (2006) 7
15. Egerton R.F. Electron Energy-loss Spectroscopy in the Electron Microscope (1996), Plenum Press, New York, London
16. Born M., and Wolf E. Principles of Optics (2003), Cambridge University Press, Cambridge
17. Krivanek O.L., Nellist P.D., Dellby N., Murfitt M.F., and Szilagyi Z. Ultramicroscopy 96 (2003) 229
18. Ishizuka K. J. Electron Microsc. 50 (2001) 291
19. Allen L.J., Findlay S.D., Oxley M.P., and Rossouw C.J. Ultramicroscopy 96 (2003) 47
20. Allen L.J., Findlay S.D., Oxley M.P., Witte C., and Zaluzec N.J. Phys. Rev. B 73 (2006) 94104
21. S.D. Findlay, M.P. Oxley, L.J. Allen, Microsc. Microanal., 2006, submitted for publication.
22. Allen L.J., and Rossouw C.J. Phys. Rev. B 42 (1990) 11644
23. Allen L.J., and Josefsson T.W. Phys. Rev. B 52 (1995) 3184
24. Oxley M.P., and Allen L.J. Phys. Rev. B 57 (1998) 3273
25. Schattschneider P., Nelhiebel M., and Jouffrey B. Phys. Rev. B 59 (1999) 10959
26. Schattschneider P., Nelhiebel M., Souchay H., and Jouffrey B. Micron 31 (2000) 333
27. Moret N., Oberli D.Y., Pelucchi E., Gogneau N., Rudra A., and Kapon E. Appl. Phys. Lett. 88 (2006) 141917
28. Van Aert S., den Dekker A.J., Van Dyck D., and van den Bos A. Ultramicroscopy 90 (2002) 273
29. Wolf E. Proc. R. Soc. A 204 (1951) 542
30. Dwyer C. Ultramicroscopy 104 (2005) 141
31. Kohl H., and Rose H. Adv. Electron. Electron. Phys. 65 (1985) 173
32. Cosgriff E.C., Oxley M.P., Allen L.J., and Pennycook S.J. Ultramicroscopy 102 (2005) 317
33. Peng Y., Nellist P.D., and Pennycook S.J. J. Electron Microsc. 53 (2004) 257