Assignment of axial wavenumber in a plasma absorption probe

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 10 A, 2007, Pages 6834-6836

  Kobayashi, Satoru ^a   Ramaswamy, Kartik ^a  

^a APPLIED MATERIALS INC   (United States)

Author keywords

Plasma absorption probe; Plasma density

Indexed keywords

GAS ABSORPTION; PLASMA DENSITY; PLASMA WAVES; WAVEFORM ANALYSIS;

AXIAL WAVENUMBERS; PLASMA ABSORPTION PROBES; PLASMA SURFACE WAVES; REACTIVE GASES;

PLASMA DIAGNOSTICS;

EID: 35348926776     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6834     Document Type: Article

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